Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
A controlled deposition of organic contamination and the removal with ozone based cleaning
Publication:
A controlled deposition of organic contamination and the removal with ozone based cleaning
Date
2001
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
5136.pdf
258.37 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claes, Martine
;
De Gendt, Stefan
;
Kenens, Conny
;
Conard, Thierry
;
Bender, Hugo
;
Storm, Wolfgang
;
Bauer, T.
;
Lagrange, Sébastien
;
Mertens, Paul
;
Heyns, Marc
Journal
Abstract
Description
Metrics
Views
2132
since deposited on 2021-10-14
1
last month
1
last week
Acq. date: 2025-12-08
Citations
Metrics
Views
2132
since deposited on 2021-10-14
1
last month
1
last week
Acq. date: 2025-12-08
Citations