Authors

Vereecke, Guy; Vos, Rita; Holsteyns, Frank; Schmidt, M.O.; Baeyens, Martien; Gomme, Steven; Snow, Jim; Coenen, V.; Mertens, Paul; Bauer, T.; Heyns, Marc

Conference

Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS

Title

Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank

Publication type

Proceedings paper

Embargo date

9999-12-31