Browsing by author "Blachut, Gregory"
Now showing items 1-4 of 4
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A progress report on DSA of high-chi silicon containing block co-polymers
Willson, C. Grant; Janes, Dustin; Ito, Natsuko; Blachut, Gregory; Sirard, Stephen; Someya, Yasunobu; Doise, Jan; Mizuochi, Ryuta; Lane, Austin; Vandenberghe, Geert; Rincon Delgadillo, Paulina; Yang, XiaoMin; Ellison, Christopher (2018) -
Directed self-assembly of silicon-containing block copolymers for 20nm lithography
Blachut, Gregory; Sirard, Stephen; Maher, Michael; Asano, Yusuke; Someya, Yasunobu; Lane, Austin; Durand, William; Gronheid, Roel; Hymes, Diane; Ellison, Christopher; Willson, Grant (2016) -
Directed self-assembly of silicon-containing block copolymers with a hybrid chemo-/grapho-epitaxial flow
Blachut, Gregory; Sirard, Stephen; Maher, Michael; Asano, Yusuke; Someya, Yasunobu; Lane, Austin; Durand, William; Gronheid, Roel; Hymes, Diane; Ellison, Christopher; Willson, Grant (2016) -
Evolution of roughness during the pattern transfer of high-chi, 10 nm half-pitch, silicon-containing block copolymer structures
Blachut, Gregory; Sirard, Stephen; Liang, Andrew; Mack, Chris; Maher, Michael; Rincon Delgadillo, Paulina; Chan, BT; Mannaert, Geert; Vandenberghe, Geert; Willson, Grant; Ellison, Christopher; Hymes, Diane (2018)