Browsing by author "De Bokx, P. K."
Now showing items 1-4 of 4
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Characterization of silicon oxynitride films by grazing-emission X-ray fluorescence spectrometry
Monaghan, M. L.; Nigam, Tanya; Houssa, Michel; De Gendt, Stefan; Urbach, H. P.; De Bokx, P. K. (2000) -
Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrology
De Bokx, P. K.; Kidd, S. J.; Wiener, G.; Urbach, H. P.; De Gendt, Stefan; Mertens, Paul; Heyns, Marc (1998) -
Silicon surface metal contamination measurements using grazing-emission XRF spectrometry
De Gendt, Stefan; Kenis, Karine; Baeyens, Martien; Mertens, Paul; Heyns, Marc; Wiener, G.; Kidd, S. J.; Knotter, D. M.; De Bokx, P. K. (1997) -
Use of grazing emission XRF for silicon wafer surface contamination measurements
De Gendt, Stefan; Kenis, Karine; Mertens, Paul; Heyns, Marc; Claes, M.; Van Grieken, R. E.; Bailleul, A.; Knotter, Martin; De Bokx, P. K. (1996)