Browsing by author "De Blank, Rene"

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A new HF vapor process for native oxide removal, suited for cluster applications

Storm, Arjen; Sprey, Hessel; Maes, Jan; Granneman, E.; De Blank, Rene; Röhr, Erika; Caymax, Matty; Heyns, Marc (1999)
UV/ozone pre-treatment on organic contaminated wafer for complete oxide removal in HF vapour cleaning

Li, Li; Alay, Josep Lluis; Mertens, Paul; Meuris, Marc; Vandervorst, Wilfried; Heyns, Marc; De Blank, Rene; Schuivens, Eugene (1994)