Browsing by author "Martin, B."

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Effects on IC quality of 5X reticle repair using FIB with stain reduction

Prewett, P. D.; Martin, B.; Watson, J. G.; Jonckheere, Rik (1994)
FIB repair of reticle defects with antistaining-effects on optical lithography from G-line to DUV

Prewett, P. D.; Martin, B.; Watson, J. G.; Eastwood, A. W.; Jonckheere, Rik (1994)