Browsing by author "Drieskens, Frederik"
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Modification of post-etch residues by UV for wet removal
Le, Quoc Toan; Drieskens, Frederik; Conard, Thierry; Lux, Marcel; de Marneffe, Jean-Francois; Struyf, Herbert; Vereecke, Guy (2012) -
Modification of post-etch residues by UV for wet removal
Le, Quoc Toan; Drieskens, Frederik; de Marneffe, Jean-Francois; Conard, Thierry; Lux, Marcel; Struyf, Herbert; Vereecke, Guy (2010)