Modification of post-etch residues by UV for wet removal

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Authors

Le, Quoc Toan; Drieskens, Frederik; Conard, Thierry; Lux, Marcel; de Marneffe, Jean-Francois; Struyf, Herbert; Vereecke, Guy

ISSN

1662-9779

Journal

Solid State Phenomena

Volume

187

Title

Modification of post-etch residues by UV for wet removal

Publication type

Journal article

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