Publication:

Modification of post-etch residues by UV for wet removal

Date

2012

Journal article

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Author(s)

;

Drieskens, Frederik

;

Conard, Thierry

;

;

de Marneffe, Jean-Francois

;

Struyf, Herbert

;

Journal

Solid State Phenomena

Statistics

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Acq. date: 2026-02-27