Browsing by author "Gomes dos Santos Filho, Sebastiao"

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Detailed characterization of the effects of plasma treatments on an advanced 2.0 low-k material

Verdonck, Patrick; Maheshwari, Abhishek; Swerts, Johan; Tielens, Hilde; Franquet, Alexis; Loyo Prado, Jana; Armini, Silvia; Baklanov, Mikhaïl; Van Elshocht, Sven; Uedono, Akira; Roque Huanca, Danilo; Gomes dos Santos Filho, Sebastiao; Kellerman, Guinther (2013)
Determination of the model for the chemical structure of porous PECVD low-k films

Verdonck, Patrick; Le, Quoc Toan; Devonport, Joshua; Huanca, Danilo; Gomes dos Santos Filho, Sebastiao; Conard, Thierry; Meersschaut, Johan; Baklanov, Mikhaïl; Van Elshocht, Sven (2015)