Browsing by author "Chang, Kao-Shuo"

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Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Chang, Kao-Shuo; Green, M.L.; Suehle, J.; Hattrick-Simpers, J.; Takeuchi, I.; Ohmori, K.; Chikyow, T.; De Gendt, Stefan; Majhi, P. (2008)
Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology

Chang, Kao-Shuo; Green, Martin L.; Hattrick-Simpers, Jason R.; Takeuchi, Ichiro; Suehle, John S.; Celik, Ozgur; De Gendt, Stefan (2008-10)