Authors

Chang, Kao-Shuo; Green, M.L.; Suehle, J.; Hattrick-Simpers, J.; Takeuchi, I.; Ohmori, K.; Chikyow, T.; De Gendt, Stefan; Majhi, P.

Conference

Dielectrics for Nanosystems 3: Materials Science, Processing, Reliability, and Manufacturing

Title

Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Publication type

Proceedings paper

Embargo date

9999-12-31