Browsing by author "Juncker, Aurélie"

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BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line

Schram, Tom; Smets, Quentin; Heyne, Markus; Groven, Benjamin; Kunnen, Eddy; Thiam, Arame; Devriendt, Katia; Delabie, Annelies; Lin, Dennis; Chiappe, Daniele; Asselberghs, Inge; Lux, Marcel; Brus, Stephan; Huyghebaert, Cedric; Sayan, Safak; Juncker, Aurélie; Caymax, Matty; Radu, Iuliana (2017)
Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

Guissi, Sofiane; Clark, William; Juncker, Aurélie; Ervin, J.; Greiner, K.; Fried, D.; Briggs, Basoene; Devriendt, Katia; Sebaai, Farid; Charley, Anne-Laure; Wilson, Chris; Boemmels, Juergen; Tokei, Zsolt (2017)
WS2 transistors on 300 mm wafers with BEOL compatibility

Schram, Tom; Smets, Quentin; Groven, Benjamin; Heyne, Markus; Kunnen, Eddy; Thiam, Arame; Devriendt, Katia; Delabie, Annelies; Lin, Dennis; Lux, Marcel; Chiappe, Daniele; Asselberghs, Inge; Brus, Stephan; Huyghebaert, Cedric; Sayan, Safak; Juncker, Aurélie; Caymax, Matty; Radu, Iuliana (2017)