BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line

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Author(s)

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Groven, Benjamin

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Devriendt, Katia

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Delabie, Annelies

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Chiappe, Daniele

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Asselberghs, Inge

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Huyghebaert, Cedric

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Juncker, Aurélie

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Metrics

1 since deposited on 2021-10-24

Acq. date: 2025-10-23

2069 since deposited on 2021-10-24

Acq. date: 2025-10-23