BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line

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Authors
Schram, Tom; Smets, Quentin; Heyne, Markus; Groven, Benjamin; Kunnen, Eddy; Thiam, Arame; Devriendt, Katia; Delabie, Annelies; Lin, Dennis; Chiappe, Daniele; Asselberghs, Inge; Lux, Marcel; Brus, Stephan; Huyghebaert, Cedric; Sayan, Safak; Juncker, Aurélie; Caymax, Matty; Radu, Iuliana
Conference
Silicon Nanoelectronics Workshop - SNW
Title
BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line
Publication type
Proceedings paper
Embargo date
9999-12-31
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