Publication:

BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line

Date

2017

Proceedings Paper

Simple item page Full metadata Statistics

Files

35579.pdf 2.15 MB

Author(s)

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Groven, Benjamin

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Devriendt, Katia

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Delabie, Annelies

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Chiappe, Daniele

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Asselberghs, Inge

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Huyghebaert, Cedric

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Juncker, Aurélie

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Statistics

1 since deposited on 2021-10-24

Acq. date: 2026-05-16

2073 since deposited on 2021-10-24

Acq. date: 2026-05-16