Browsing by author "Gueneau de Mussy, Jean Paul"
Now showing items 1-6 of 6
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Characterisation and behaviour of Ti/TiO2 noble metal anodes
Gueneau de Mussy, Jean Paul; Macpherson, J.V.; Delplancke, J.L. (2003) -
Novel selective sidewall airgap process
Gueneau de Mussy, Jean Paul; Bruynseraede, Christophe; Tokei, Zsolt; Beyer, Gerald; Maex, Karen (2005) -
Selective airgaps: towards a scalable lowk solution
Gueneau de Mussy, Jean Paul; Beyer, Gerald; Maex, Karen (2005) -
Selective sidewall airgap integration for deep submicrometer interconnects
Gueneau de Mussy, Jean Paul; Richard, Olivier; Beyer, Gerald; Maex, Karen (2004) -
Self assembled airgap structures
Gueneau de Mussy, Jean Paul; Beyer, Gerald; Maex, Karen (2004) -
The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation
Travaly, Youssef; Sinapi, Fabrice; Heylen, Nancy; Humbert, Aurelie; Delande, Tinne; Caluwaerts, Rudy; Gueneau de Mussy, Jean Paul; Vereecke, Guy; Baklanov, Mikhaïl; Iacopi, Francesca; Hernandez, Jose Luis; Beyer, Gerald; Fischer, Pamela (2007)