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The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation
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1924 since deposited on 2021-10-16
Acq. date: 2026-02-25
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Views
1924 since deposited on 2021-10-16
Acq. date: 2026-02-25
Citations