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The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation
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1923 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-13
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Views
1923 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-13
Citations