Authors

Travaly, Youssef; Sinapi, Fabrice; Heylen, Nancy; Humbert, Aurelie; Delande, Tinne; Caluwaerts, Rudy; Gueneau de Mussy, Jean Paul; Vereecke, Guy; Baklanov, Mikhaïl; Iacopi, Francesca; Hernandez, Jose Luis; Beyer, Gerald; Fischer, Pamela

Conference

IEEE International Interconnect Technology Conference - IITC

Title

The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation

Publication type

Proceedings paper

Embargo date

9999-12-31