Browsing by author "Fukui, Takeo"
Now showing items 1-3 of 3
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Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing
Iino, Hideaki; Tanaka, Yoichi; Gan, Nobuko; Fukui, Takeo; Akanishi, Yuya; Iwahata, Shota; Oniki, Yusuke; Altamirano Sanchez, Efrain; Holsteyns, Frank (2021) -
Study on La2O3 wet clean by pH controlled functional water
Ogawa, Yuichi; Hideaki, Iino; Fukui, Takeo; Oniki, Yusuke; Akanishi, Yuya; Altamirano Sanchez, Efrain; Holsteyns, Frank (2019) -
Study on La2O3 wet clean by pH controlled functional water
Ogawa, Yuichi; Iino, Hideaki; Fukui, Takeo; Oniki, Yusuke; Akanishi, Yuya; Altamirano Sanchez, Efrain; Holsteyns, Frank (2019)