Study on La2O3 wet clean by pH controlled functional water

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Authors
Ogawa, Yuichi; Iino, Hideaki; Fukui, Takeo; Oniki, Yusuke; Akanishi, Yuya; Altamirano Sanchez, Efrain; Holsteyns, Frank
Conference
16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)
Title
Study on La2O3 wet clean by pH controlled functional water
Publication type
Proceedings paper
Embargo date
9999-12-31
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