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Study on La2O3 wet clean by pH controlled functional water
Publication:
Study on La2O3 wet clean by pH controlled functional water
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Date
2019
Proceedings Paper
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43455.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ogawa, Yuichi
;
Iino, Hideaki
;
Fukui, Takeo
;
Oniki, Yusuke
;
Akanishi, Yuya
;
Altamirano Sanchez, Efrain
;
Holsteyns, Frank
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1
since deposited on 2021-10-27
Acq. date: 2025-12-12
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1974
since deposited on 2021-10-27
3
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1
last week
Acq. date: 2025-12-12
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Metrics
Downloads
1
since deposited on 2021-10-27
Acq. date: 2025-12-12
Views
1974
since deposited on 2021-10-27
3
last month
1
last week
Acq. date: 2025-12-12
Citations