Browsing by author "Chew, Soon Aik"

Co and Ru dual damascene compatible metallization studies

van der Veen, Marleen; Heylen, Nancy; Lariviere, Stephane; Vega Gonzalez, Victor; Kesters, Els; Le, Quoc Toan; Teugels, Lieve; Chew, Soon Aik; Philipsen, Harold; Hung, Joey; Adelmann, Christoph; Vanstreels, Kris; Jourdan, Nicolas; Holsteyns, Frank; Struyf, Herbert; Wilson, Chris; Tokei, Zsolt (2019)

Cu Pad Surface Height Evaluation Technique by In-line SEM for Wafer Hybrid Bonding

Kasai, Hiroaki; Osaki, Mayuka; Hasumi, Kazuhisa; Mise, Nobuyuki; Tanaka, Maki; Tunca Altintas, Bensu; Chew, Soon Aik; Bogdanowicz, Janusz; Moussa, Alain; Saib, Mohamed; Zhang, Boyao; Charley, Anne-Laure (2024)

Process variation analysis of device performance using virtual fabrication: methodology demonstrated on a CMOS 14-nm FinFET vehicle

Vincent, Benjamin; Hathwar, R.; Kamon, M.; Ervin, J.; Schram, Tom; Chiarella, Thomas; Demuynck, Steven; Baudot, Sylvain; Siew, Yong Kong; Kubicek, Stefan; Dentoni Litta, Eugenio; Chew, Soon Aik; Mitard, Jerome (2020)

Reliability Investigation of W2W Hybrid Bonding Interface: Breakdown Voltage and Leakage Mechanism

Hou, Lin; Chery, Emmanuel; Croes, Kristof; Tierno, Davide; Chew, Soon Aik; Chen, Yangyin; Rakbin, Peter; Beyne, Eric (2022-03)