Publication:

Co and Ru dual damascene compatible metallization studies

Date

2019

Proceedings Paper

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Author(s)

van der Veen, Marleen

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;

Lariviere, Stephane

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Vega Gonzalez, Victor

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;

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Philipsen, Harold

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;

Adelmann, Christoph

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Vanstreels, Kris

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Jourdan, Nicolas

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Holsteyns, Frank

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Struyf, Herbert

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;

Metrics

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