Publication:

Co and Ru dual damascene compatible metallization studies

Date

2019

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

van der Veen, Marleen

;

;

Lariviere, Stephane

;

Vega Gonzalez, Victor

;

;

;

;

;

Philipsen, Harold

;

;

Adelmann, Christoph

;

Vanstreels, Kris

;

Jourdan, Nicolas

;

Holsteyns, Frank

;

Struyf, Herbert

;

;

Metrics

2315 since deposited on 2021-10-27

Acq. date: 2026-01-10