Co and Ru dual damascene compatible metallization studies

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Author(s)

van der Veen, Marleen

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Lariviere, Stephane

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Vega Gonzalez, Victor

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Philipsen, Harold

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Adelmann, Christoph

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Vanstreels, Kris

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Jourdan, Nicolas

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Holsteyns, Frank

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Struyf, Herbert

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Metrics

2305 since deposited on 2021-10-27

Acq. date: 2025-10-23