Authors

Vincent, Benjamin; Hathwar, R.; Kamon, M.; Ervin, J.; Schram, Tom; Chiarella, Thomas; Demuynck, Steven; Baudot, Sylvain; Siew, Yong Kong; Kubicek, Stefan; Dentoni Litta, Eugenio; Chew, Soon Aik; Mitard, Jerome

ISSN

0018-9383

Issue

12

Journal

IEEE Transactions on Electron Devices

Volume

67

Title

Process variation analysis of device performance using virtual fabrication: methodology demonstrated on a CMOS 14-nm FinFET vehicle

Publication type

Journal article