Browsing by author "Thorsteinsson, Sune"

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Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures

Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Bogdanowicz, Janusz; Cornagliotti, Emanuele; Vandervorst, Wilfried; Bender, Hugo; Pfeffer, Markus; Schellenberger, Martin; Nielsen, Peter; Thorsteinsson, Sune; Lin, Rong; Petersen, Dirch (2009)
Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Bogdanowicz, Janusz; Vandervorst, Wilfried; Bender, Hugo; Pfeffer, Markus; Schellenberger, Martin; Nielsen, Peter; Thorsteinsson, Sune; Lin, Rong; Petersen, Dirch (2010)