Authors

Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Bogdanowicz, Janusz; Cornagliotti, Emanuele; Vandervorst, Wilfried; Bender, Hugo; Pfeffer, Markus; Schellenberger, Martin; Nielsen, Peter; Thorsteinsson, Sune; Lin, Rong; Petersen, Dirch

Conference

International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling

Title

Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures

Publication type

Proceedings paper