Publication:

Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures

Date

2009
Proceedings Paper
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dc.contributor.authorClarysse, Trudo
dc.contributor.authorMoussa, Alain
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorCornagliotti, Emanuele
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBender, Hugo
dc.contributor.authorPfeffer, Markus
dc.contributor.authorSchellenberger, Martin
dc.contributor.authorNielsen, Peter
dc.contributor.authorThorsteinsson, Sune
dc.contributor.authorLin, Rong
dc.contributor.authorPetersen, Dirch
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorParmentier, Brigitte
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorCornagliotti, Emanuele
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.accessioned2021-10-17T21:37:52Z
dc.date.available2021-10-17T21:37:52Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15114
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa, CA USA
dc.title

Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures

dc.typeProceedings paper
dspace.entity.typePublication
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