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Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures
Publication:
Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures
Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Moussa, Alain
;
Parmentier, Brigitte
;
Bogdanowicz, Janusz
;
Cornagliotti, Emanuele
;
Vandervorst, Wilfried
;
Bender, Hugo
;
Pfeffer, Markus
;
Schellenberger, Martin
;
Nielsen, Peter
;
Thorsteinsson, Sune
;
Lin, Rong
;
Petersen, Dirch
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1890
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1890
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations