Browsing by author "Lebon, Hans"
Now showing items 1-5 of 5
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450 mm: from plan to reality
Lebon, Hans (2011) -
450 mm: from plan to reality
Lebon, Hans (2011) -
Managing and controlling contamination in an advanced 8" CMOS pilot line
De Backker, Kris; Deweerd, Wim; Lebon, Hans (2001) -
Safety and reliability issues for introducing new materials in a 300 mm Si R&D process line
Claeys, Cor; Pardon, Alain; Lebon, Hans (2009) -
The need for EUV lithography at advanced technology for sustainable wafer cost
Mallik, Arindam; Vansumere, Wim; Ryckaert, Julien; Mercha, Abdelkarim; Horiguchi, Naoto; Demuynck, Steven; Boemmels, Juergen; Tokei, Zsolt; Vandenberghe, Geert; Ronse, Kurt; Thean, Aaron; Verkest, Diederik; Lebon, Hans; Steegen, An (2013)