Browsing by author "Toublan, O."
Now showing items 1-3 of 3
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Application of a new approach to optical proximity correction
Rosenbusch, A.; Hourd, A.; Juffermans, Casper; Kirsch, H.; Lalanne, F.; Maurer, W.; Romeo, C.; Ronse, Kurt; Schiavone, P.; Simecek, M.; Toublan, O.; Vermeulen, Tom; Watson, J.; Ziegler, W.; Zimmerman, R. (1999) -
New approach to optical proximity correction
Rosenbusch, A.; Hourd, A.; Juffermans, C.; Kirsch, H.; Lalanne, F.; Maurer, W.; Romeo, C.; Ronse, Kurt; Schiavone, P.; Simecek, M.; Toublan, O.; Watson, J.; Ziegler, W.; Zimmermann, R. (1998) -
(Sub-) 100-nm gate patterning using 248-nm alternating PSM
Vandenberghe, Geert; Jaenen, Patrick; Jonckheere, Rik; Ronse, Kurt; Toublan, O. (2001)