Publication:

Application of a new approach to optical proximity correction

Date

1999

Proceedings Paper

Simple item page Full metadata Statistics

Files

3749.pdf 1.03 MB

Author(s)

;

;

Juffermans, Casper

;

;

;

;

;

;

;

;

;

;

;

;

Statistics

2080 since deposited on 2021-10-14

Acq. date: 2026-01-26