Browsing by author "Patsis, G.P."
Now showing items 1-6 of 6
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Determining the impact of statistical fluctuations on resist edge roughness
Leunissen, Peter; Ercken, Monique; Patsis, G.P. (2005) -
Investigation of statistical Fluctuations on line edge rougness
Leunissen, Peter; Patsis, G.P.; Van Steenwinckel, David; Lammers, Jeroen (2005) -
Line edge roughness and critical dimension variation: Fractal characterization and comparison using model functions
Constantoudis, V.; Patsis, G.P.; Leunissen, Peter; Gogolides, E. (2004-08) -
Quantification of line-edge roughness of photoresists. I: A comparison between off-line and on-line analysis of top-down scanning electron microscopy images
Patsis, G.P.; Constantoudis, V.; Tserepi, A.; Gogolides, E.; Grozev, Grozdan (2003) -
Roughness analysis of lithographically produced nanostructures: off-line measurement and scaling analysis
Patsis, G.P.; Constantoudis, V.; Tserepi, A.; Gogolides, E.; Grozev, Grozdan; Hoffmann, Thomas (2003) -
Simulation of the combined effects of polymer size, acid diffusion length, and EUV secondary electron blur on resist line-edge roughness
Drygianakis, D.; Nijkerk, M.D.; Patsis, G.P.; Kokkoris, G.; Raptis, I.; Leunissen, Peter; Gogolides, E. (2007)