Browsing by author "Luzinov, Igor"
Now showing items 1-4 of 4
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Composite polymer core – ceria shell abrasive particles during silicon oxide CMP
Armini, Silvia; De Messemaeker, Joke; Burtovyy, Ruslan; Luzinov, Igor; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2007) -
Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM
Armini, Silvia; Burtovyy, Ruslan; Moinpour, Mansour; Luzinov, Igor; De Messemaeker, Joke; Whelan, Caroline; Maex, Karen (2008) -
Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM
Armini, Silvia; Burtovyy, Ruslan; Luzinov, Igor; Whelan, Caroline; Maex, Karen; Moinpour, Mansour (2007) -
Interaction forces between oxide and silica-modified terpolymer abrasive and their impact on CMP and post-CMP
Armini, Silvia; Burtovyy, Ruslan; Luzinov, Igor; Whelan, Caroline; Maex, Karen; Moinpour, Mansour (2008)