Authors

Armini, Silvia; Burtovyy, Ruslan; Luzinov, Igor; Whelan, Caroline; Maex, Karen; Moinpour, Mansour

Conference

Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS

Title

Interaction forces between oxide and silica-modified terpolymer abrasive and their impact on CMP and post-CMP

Publication type

Proceedings paper