Publication:
Interaction forces between oxide and silica-modified terpolymer abrasive and their impact on CMP and post-CMP
Date
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Burtovyy, Ruslan | |
| dc.contributor.author | Luzinov, Igor | |
| dc.contributor.author | Whelan, Caroline | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Moinpour, Mansour | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-17T06:13:56Z | |
| dc.date.available | 2021-10-17T06:13:56Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13310 | |
| dc.identifier.url | http://www.scientific.net/ | |
| dc.source.beginpage | 169 | |
| dc.source.conference | Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS | |
| dc.source.conferencedate | 18/09/2006 | |
| dc.source.conferencelocation | Antwerpen belgium | |
| dc.source.endpage | 172 | |
| dc.title | Interaction forces between oxide and silica-modified terpolymer abrasive and their impact on CMP and post-CMP | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |