Browsing by author "Tarutani, S."
Now showing items 1-3 of 3
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Exploration of new resist chemistries and process methods for enabling dual-tone development
Fonseca, Carlos; Somervell, M.; Scheer, S.; Kuwahara, Y.; Nafus, Kathleen; Gronheid, Roel; Tarutani, S. (2009) -
Printing the contact and metal layers for the 32 and 22 nm node: comparing positive and negative development process
Bekaert, Joost; Van Look, Lieve; Wiaux, Vincent; Truffert, Vincent; Maenhoudt, Mireille; Vandenberghe, Geert; Reybrouck, Mario; Tarutani, S. (2009) -
Unraveling the effect of resist composition on EUV optics contamination
Pollentier, Ivan; Neira, Imanol; Goethals, Mieke; Gronheid, Roel; Tarutani, S.; Tamaoki, H.; Takahashi, T.; Tsubaki, H. (2011)