Authors

Bekaert, Joost; Van Look, Lieve; Wiaux, Vincent; Truffert, Vincent; Maenhoudt, Mireille; Vandenberghe, Geert; Reybrouck, Mario; Tarutani, S.

Conference

6th International Symposium on Immersion Lithography Extensions

Title

Printing the contact and metal layers for the 32 and 22 nm node: comparing positive and negative development process

Publication type

Proceedings paper

Embargo date

9999-12-31