Browsing by author "Fang, Chao"
Now showing items 1-3 of 3
-
A compact physical CD-SEM simulator for IC photolithography modeling applications
Fang, Chao; Smith, Mark D; Vaglio Pret, Alessandro; Biafore, John; Robertson, Steward A; Bekaert, Joost (2014) -
Investigation of interactions between metrology and lithography with a CD SEM simulator
Smith, Mark D.; Fang, Chao; Biafore, John J.; Vaglio Pret, Alessandro; Robinson, Stewart A. (2014) -
Understanding the impact of CD-SEM artifacts on metrology via experiments and simulations
Fang, Chao; Vaglio Pret, Alessandro; Smith, Mark D.; Biafore, John J.; Robertson, Steward; Bekaert, Joost (2015)