Browsing by author "Gunn, Robert"

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Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

Witvrouw, Ann; Rusu, C.; Janssen, Henri; Gunn, Robert (2004)
Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow process

Rusu, Cristina; Jansen, Henri; Gunn, Robert (2003)