Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow process

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Authors
Rusu, Cristina; Jansen, Henri; Gunn, Robert
Conference
Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP of MEMS & MOEMS
Title
Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow process
Publication type
Proceedings paper
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