Publication:
Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow process
Date
| dc.contributor.author | Rusu, Cristina | |
| dc.contributor.author | Jansen, Henri | |
| dc.contributor.author | Gunn, Robert | |
| dc.date.accessioned | 2021-10-15T06:28:29Z | |
| dc.date.available | 2021-10-15T06:28:29Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8095 | |
| dc.source.beginpage | 245 | |
| dc.source.conference | Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP of MEMS & MOEMS | |
| dc.source.conferencedate | 5/05/2003 | |
| dc.source.conferencelocation | Cannes France | |
| dc.source.endpage | 250 | |
| dc.title | Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow process | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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