Browsing by author "Schuhmacher, M."

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Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric

Van Elshocht, Sven; Weber, U.; Conard, Thierry; Kaushik, Vidya; Houssa, Michel; Hyun, Sangjin; Seitzinger, Bernard; Lehnen, Peer; Schuhmacher, M.; Lindner, J.; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2005)
Improving CMOS performance by AVD® grown high-k dielectrics and advanced metal electrodes

Weber, U.; Boissière, O.; Lindner, J.; Schuhmacher, M.; Lehnen, Peer; Manke, C.; Van Elshocht, Sven; Caymax, Matty; Cosnier, V.; McEntee, T. (2005)