Browsing by author "Okawa, Hiroshi"

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Defect profiling and the role of nitrogen in lanthanum oxide-capped high-k dielectrics for nMOS applications

O'Sullivan, Barry; Mitsuhashi, Riichirou; Okawa, Hiroshi; Sengoku, Naohisa; Schram, Tom; Groeseneken, Guido; Biesemans, Serge; Nakabayashi, Takashi; Ikeda, Atsushi; Niwa, Masaaki (2008-09)
Quantification of MOSFET device reliability with low-Vt lanthanum-incorporated high permittivity dielectrics

O'Sullivan, Barry; Aoulaiche, Marc; Cho, Moon Ju; Kauerauf, Thomas; Degraeve, Robin; Okawa, Hiroshi; Schram, Tom; Hoffmann, Thomas Y.; Groeseneken, Guido; Biesemans, Serge; Nakabayashi, Takashi; Ikeda, Atsushi; Niwa, Masaaki (2009)