Authors

O'Sullivan, Barry; Mitsuhashi, Riichirou; Okawa, Hiroshi; Sengoku, Naohisa; Schram, Tom; Groeseneken, Guido; Biesemans, Serge; Nakabayashi, Takashi; Ikeda, Atsushi; Niwa, Masaaki

Conference

International Conference on Solid State Devices and Materials - SSDM

Title

Defect profiling and the role of nitrogen in lanthanum oxide-capped high-k dielectrics for nMOS applications

Publication type

Proceedings paper