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Defect profiling and the role of nitrogen in lanthanum oxide-capped high-k dielectrics for nMOS applications
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1973 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-10
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Metrics
Views
1973 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-10
Citations