Browsing by author "Klostermann, Ulrich K."
Now showing items 1-3 of 3
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Accurate models for EUV simulation and their use for design correction
Lorusso, Gian; Hermans, Jan; Baudemprez, Bart; Hendrickx, Eric; Klostermann, Ulrich K.; Jang, Stephen; Zavyalova, Lena; Sorensen, Jacob; Gao, Weimin; Lucas, Kevin (2009) -
Calibration of physical resist models for simulation of extreme ultraviolet lithography
Klostermann, Ulrich K.; Muelders, Thomas; Schmoeller, Thomas; Lorusso, Gian; Hendrickx, Eric (2011) -
Physical resist models and their calibration: their readiness for accurate EUV lithography simulation
Klostermann, Ulrich K.; Muelders, Thomas; Schmoeller, Thiomas; Lorusso, Gian; Hendrickx, Eric (2010)