Browsing by author "Warad, L."
Now showing items 1-2 of 2
-
300 mm-wafer characterization of ruthenium area-selective deposition in nanoscale line-space and hole patterns
Clerix, Jan-Willem; Delabie, Annelies; Hung, Joey; Warad, L.; Shah, Kavita (2020) -
300 mm-wafer metrology for area-selective deposition in nanoscale patterns: A case study for ruthenium atomic layer deposition
Clerix, Jan-Willem; Warad, L.; Hung, J.; Hody, Hubert; Van Roey, Frieda; Lorusso, Gian; Koret, R.; Lee, W. T.; Shah, K.; Delabie, Annelies (2023)