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300 mm-wafer characterization of ruthenium area-selective deposition in nanoscale line-space and hole patterns
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Authors
Clerix, Jan-Willem
;
Delabie, Annelies
;
Hung, Joey
;
Warad, L.
;
Shah, Kavita
Conference
20th International Conference on Atomic Layer Deposition
Title
300 mm-wafer characterization of ruthenium area-selective deposition in nanoscale line-space and hole patterns
Publication type
Meeting abstract
Embargo date
9999-12-31
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