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300 mm-wafer metrology for area-selective deposition in nanoscale patterns: A case study for ruthenium atomic layer deposition
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Authors
Clerix, Jan-Willem
;
Warad, L.
;
Hung, J.
;
Hody, Hubert
;
Van Roey, Frieda
;
Lorusso, Gian
;
Koret, R.
;
Lee, W. T.
;
Shah, K.
;
Delabie, Annelies
DOI
10.1016/j.apsusc.2023.157222
ISSN
0169-4332
Issue
July
Journal
APPLIED SURFACE SCIENCE
Volume
626
Title
300 mm-wafer metrology for area-selective deposition in nanoscale patterns: A case study for ruthenium atomic layer deposition
Publication type
Journal article
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2
20.500.12860/41611.2
*
2023-07-12T20:52:52Z
validation by library/open access desk
1
20.500.12860/41611
2023-05-22T20:15:46Z
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