Browsing by author "Clerix, Jan-Willem"
Now showing items 1-13 of 13
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300 mm-wafer characterization of ruthenium area-selective deposition in nanoscale line-space and hole patterns
Clerix, Jan-Willem; Delabie, Annelies; Hung, Joey; Warad, L.; Shah, Kavita (2020) -
300 mm-wafer metrology for area-selective deposition in nanoscale patterns: A case study for ruthenium atomic layer deposition
Clerix, Jan-Willem; Warad, L.; Hung, J.; Hody, Hubert; Van Roey, Frieda; Lorusso, Gian; Koret, R.; Lee, W. T.; Shah, K.; Delabie, Annelies (2023) -
Alkanethiolate Self-Assembled Monolayers on Cu: a Density Functional Theory Study of Formation and Phase Behavior
Clerix, Jan-Willem; Sanz-Matias, Ana; Armini, Silvia; Harvey, Jeremy; Delabie, Annelies (2019) -
Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions
Van Dongen, Kaat; Nye, Rachel; Clerix, Jan-Willem; Sixt, Claudia; De Simone, Danilo; Delabie, Annelies (2023) -
Bottom-up nanoelectronic device fabrication by Area-Selective Deposition
Soethoudt, Job; Clerix, Jan-Willem; Sanz-Matias, Ana; Harvey, Jeremy; Delabie, Annelies (2018) -
From surface dependence in atomic layer deposition to area-selective deposition of TiN
Delabie, Annelies; Carbajal, Diego; Soethoudt, Job; Chan, BT; Altamirano Sanchez, Efrain; Meynaerts, Ben; Clerix, Jan-Willem; Van Elshocht, Sven (2019) -
In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor
Clerix, Jan-Willem; Dianat, Golnaz; Delabie, Annelies; Parsons, Gregory N. (2023) -
Kinetic modeling of Ru area-selective atomic layer deposition in nanopatterns
Clerix, Jan-Willem; Marques, Esteban; Soethoudt, Job; Delabie, Annelies (2020) -
Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns
Sinha, Jyoti; Gallis, Leonidas; Clerix, Jan-Willem; van der Veen, Marleen; Innocent, Jerome; Illiberi, Andrea; Givens, Michael; Nyns, Laura; Delabie, Annelies (2024) -
Phase Transitions of Alkanethiolate Self-Assembled Monolayers (C1-12) on Cu by Density Functional Theory
Clerix, Jan-Willem; Sanz-Matias, Ana; Armini, Silvia; Harvey, Jeremy; Delabie, Annelies (2019) -
Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub-50 nm Nanopatterns by Diffusion and Size-Dependent Reactivity
Grillo, Fabio; Van Ommen, Ruud; Clerix, Jan-Willem; Marques, Esteban; Soethoudt, Job; Pourtois, Geoffrey; Delabie, Annelies (2021-08-11) -
Structural phases of alkanethiolate self-assembled monolayers (C1-12) on Cu[100] by density functional theory
Clerix, Jan-Willem; Sanz-Matias, Ana; Armini, Silvia; Harvey, Jeremy; Delabie, Annelies (2020) -
Structural phases of alkanethiolate self-assembled monolayers (C1-12) on Cu[100] by density functional theory
Clerix, Jan-Willem; Sanz-Matias, Ana; Armini, Silvia; Harvey, Jeremy; Delabie, Annelies (2019)