Browsing by author "Chang, Vincent S."

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DyScHfO as high-k gate dielectric: structural and electrical properties

Adelmann, Christoph; Van Elshocht, Sven; Lehnen, Peer; Conard, Thierry; Franquet, Alexis; Zhao, Chao; Ragnarsson, Lars-Ake; Chang, Vincent S.; Cho, Hag-Ju; Yu, HongYu; De Gendt, Stefan (2007)
The impact of stacked cap layers on effective work function with HfSiON and SiON gate dielectrics

Cho, Hag-Ju; Yu, Hong Yu; Chang, Vincent S.; Akheyar, Amal; Jakschik, Stefan; Conard, Thierry; Hantschel, Thomas; Delabie, Annelies; Adelmann, Christoph; Van Elshocht, Sven; Ragnarsson, Lars-Ake; Schram, Tom; Absil, Philippe; Biesemans, Serge (2008-07)